Laboratory for design, characterization, and measuring of chips and biological samples on chips using vector network analyzers and probe stations in the frequency bands 10 MHz-67 GHz and 90 GHz – 220 GHz.
Equipment:
- Vector network analyzers (ZVA67 and ZNB8, Rohde&Schwarz)
- Millimeterwave converters (ZC140 and ZC220, Rohde&Schwarz, 90-140GHz, 140-220GHz)
- Manual probe system (MPI, TS150)
- Fully-automated contact-free on-wafer testing system (TP-100-A8025, TeraProbes)
- Signal generator (Rohde&Schwarz SMB 100A, 100 kHz – 40 GHz)
- Signal generator (Agilent E4436B, 250 kHz – 3 GHz)
- Spectral analyzer (Agilent E4448A, 3 Hz – 50 GHz)
- Spectral analyzer (Rohde&Schwarz, 20 Hz – 3,5 GHz)
- Oscilloscope (Agilent DSO80604B 6GHz 40GSa/s)
- Oscilloscope (GW instek GDS-2202E, 200 MHz)
- LCR meter (891, BK Precision, 20 Hz to 300 kHz)
- Microscope (BX51, Olympus, reflected light microscopy with Nomarski contrast)
- High voltage nanosecond pulse generator (NRG1001, Megaimpulse, 1.5 kV – 10 kV, 10 ns, 1 Hz – 1 KHz)
- High voltage pulse generator (ELECTROcell B15, Leroy-Biotech, 30V – 1500 V or -30 V – 1500 V, 5 μs – 5 ms, 0.01 Hz – 20 kHz)
- High voltage pulse generator (HP 214B, 100 V, 25 ns – 10 ms)
- High voltage pulse generator (VELONEX 380, 500 V, 25 ns – 25 µs)
- Electromagnetic shielded box (-80 dB in 5 MHz – 40 GHz, 70x70x70 cm)
- 3D printer (Original Prusa, i3 MK3S+)
