The laboratory for optoelectrical characterization is equipped with different setups for the electrical characterization of semiconductor materials, devices, and structures in the temperature range of -190 to 600 °C. The electrical characterization equipment consists of Source Measure Units for current-voltage (I-V) measurements (with fA resolution), a capacitance–voltage (C-V) module for AC impedance measurements, and a setup for the measurement of gas-sensing properties.
Equipment:
Setup 1:
- CRYO600-190-OP4-VB (SIMTRUM: Temperature Control Range from -190 to 600 °C; 4x adjustable probes; capable of fA level measurements; probe displacement accuracy- 1μm)
- Parameter analyzer 4200A-SCS-PKA (Keithley: 3x I-V Source Measure Units; 100 fA measurement resolution; 10 aA measurement resolution with preamplifier)
- Tunable monochromatic light sources (Quantum Design: 150 W Xe-Arc Lamp; monochromator MSZ-100)
Setup 2:
- E4990A impedance analyzers (KEYSIGHT: 20 Hz-10 MHz)
Setup 3:
- LN cryostat with cryogenic temperature controller Lake Shore 330,340 (temperature control range from -190 to 150 °C)
- High-temperature probe station for the measurement of gas-sensing properties (SIMTRUM: Temperature Control Range from RT to 600 °C; 4x triaxial probes; capable of pA level measurements)
- Setup for the measurement of gas-sensing properties at RT (in-house designed: test chamber, sensor holder, and mass flow controllers MV304 and MV302)
Setup 4:
- Four-point Probe Station (Ossila)