Nano-/microstructures and thin layer preparation and characterization laboratories

Research and development of new types of plasmonic nanostructures and microfluidic structures for optical biosensors.

Nano-/microstructures preparation equipment:

  • 3D printer for liquid resin printings, DLP technology (MAX X, Asiga)
  • direct-write photolitography machine (MicroWriter ML2, Durham Magneto Optics)
  • 3D litography machine based on two-photon polymarization (Photonic profesional GT2, Nanoscribe)
  • electron beam lithography (e_LiNE plus, Raith)
  • ion beam litography (Versa3D DualBeam, FEI)
  • holography setup: He-Cd laser 325nm (model IK3031R-C, Kimmon Koha), laser 405nm (CrystalLaser), beam-splitters, mirrors
  • Nano-imprint (PL400, EZImprinting)
  • UV lamp for resist curing

Nano-/microstructures characterization equipment:

  • scanning electron microscope – SEM (Versa3D DualBeam, FEI)
  • optical profilometer (NewView7300, ZYGO)
  • mechanical profilometer (Alpha Step, Tencor)
  • 2D/3D imaging systems (MRCL700, Microqubic)
  • digital microscope (VisionZ 2)
  • peristaltic pumps (IPC, Ismatec), syring pumps (Lagato 180, KD Scientific)
  • pressure driven pumps (Cobalt, Elveflow)

Thin layer preparation equipment:

  • vacuum deposition setup (PLS 570L, PLS 570, Pfeiffer vacuum)
  • plasma surface treatment technology (Nano, Diener electronic)
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