Research and development of new types of plasmonic nanostructures and microfluidic structures for optical biosensors.
Nano-/microstructures preparation equipment:
- 3D printer for liquid resin printings, DLP technology (MAX X, Asiga)
- direct-write photolitography machine (MicroWriter ML2, Durham Magneto Optics)
- 3D litography machine based on two-photon polymarization (Photonic profesional GT2, Nanoscribe)
- electron beam lithography (e_LiNE plus, Raith)
- ion beam litography (Versa3D DualBeam, FEI)
- holography setup: He-Cd laser 325nm (model IK3031R-C, Kimmon Koha), laser 405nm (CrystalLaser), beam-splitters, mirrors
- Nano-imprint (PL400, EZImprinting)
- UV lamp for resist curing
Nano-/microstructures characterization equipment:
- scanning electron microscope – SEM (Versa3D DualBeam, FEI)
- optical profilometer (NewView7300, ZYGO)
- mechanical profilometer (Alpha Step, Tencor)
- 2D/3D imaging systems (MRCL700, Microqubic)
- digital microscope (VisionZ 2)
- peristaltic pumps (IPC, Ismatec), syring pumps (Lagato 180, KD Scientific)
- pressure driven pumps (Cobalt, Elveflow)
Thin layer preparation equipment:
- vacuum deposition setup (PLS 570L, PLS 570, Pfeiffer vacuum)
- plasma surface treatment technology (Nano, Diener electronic)