scan4surf - Inline Process Metrology for Laser Structuring Systems (project of the European Micro and Nano Technology program

Sponsor: Ministry of Education, Youth and Sports of the Czech Republic

Principal investigator: Pavel Peterka, Ph.D.

Members: Ivan Kašík, Ph.D.; Ondřej Podrazký, Ph.D.; Filip Todorov, Ph.D.

From: 2010-03-05

To: 2012-12-31

The aim of the European project scan4surf was to develop a measurement system for industrial laser that processes precision parts such as moulding parts for the automotive or aerospace industry. These forms are very expensive and inaccurate focusing of the high-power laser could irreparably damage the whole mould. The measurement system provides distance inspection and precise focusing of the laser processing head in-line, it means during the laser structuring process. The advantage is that the measuring beam interferometric sensor shares the path of the laser beam that is used for microstructuring itself. The coordinators of the project were the German company Precitec (the world-leading manufacturer of laser cutting and welding heads) and the Fraunhofer Institute for Manufacturing Technology. The Czech coordinator was the company Safibra and we task was to develop a suitable source of radiation for measuring sensor. One of the sources was based on optical fibres doped with ytterbium. Its advantage is higher power over to semiconductor LEDs.



Partners from Germany:
Fraunhofer Institute for Production Technology, Aachen
Precitec Optronik GmbH, Rodgau
ModuleWorks GmbH, Aachen
Werkzeugbau Siegfried Hofmann GmbH, Lichtenfels

Partners from the Czech Republic:
Safibra, Říčany
ÚFE AV ČR, v.v.i., Praha
IMS s. r. o., Česká Třebová


  1. P. Peterka, F. Todorov, I. Kašík, V. Matějec, O. Podrazký, L. Šašek, G. Mallmann, R. Schmitt, "Wideband and high-power light sources for in-line interferometric diagnostics of laser structuring systems," Proc. SPIE 8697, p. 869718, 2012
  2. R. Schmitt, G. Mallmann and P. Peterka, "Development of a FD-OCT for the inline process metrology in laser structuring system", Proc SPIE 8082, p. 808228, 2011, presented in conference SPIE Optical Metrology (collocated with LASER-World of Photonics), Munich, Germany, 23-26 May 2011.

IPE carries out fundamental and applied research in the scientific fields of photonics, optoelectronics and electronics. In these fields, IPE generates new knowledge and develops new technologies.

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